Apparatus and method for extending target material delivery system lifetime

Disclosed is a system for generating EUV radiation in which current flowing through target material in the orifice 320 of a nozzle in a droplet generator is controlled by providing alternate lower impedance paths for the current and/or by limiting a high frequency component of a drive signal applied...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Abraham, Mathew Cheeran, Rajyaguru, Chirag, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
Online-Zugang:	Volltext bestellen
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