Passivation layer for integrated circuit structure and forming the same

An integrated circuit (IC) structure includes a substrate, a transistor, an interconnect structure, a plurality of metal lines, an oxide liner, a passivation layer, and a nitride layer. The transistor is on the substrate. The interconnect structure is over the transistor. The metal lines is on the i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wang, Chih-Pin, Chen, Chun-Chiang, Wu, Chun-Ting, Su, Ching-Hou
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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