Optical axis adjustment jig and method of confirming optical axis of laser processing apparatus

There is provided an optical axis adjustment jig including a flat parallel-surface plate having an upper surface and a lower surface with reflective films disposed respectively thereon, and an image capturing unit disposed beneath the flat parallel-surface plate for capturing an image of a laser bea...

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Bibliographische Detailangaben
1. Verfasser: Nomaru, Keiji
Format: Patent
Sprache:eng
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