Reactor for coating particles in stationary chamber with rotating paddles and gas injection

A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle ass...

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Bibliographische Detailangaben
Hauptverfasser: Neikirk, Colin C, Desai, Govindraj, Krishnasamy, Sekar, Narwankar, Pravin K, Swaminathan, Shrikant, Truong, Quoc, Frankel, Jonathan
Format: Patent
Sprache:eng
Schlagworte:
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