Manufacturing method for an artificially oriented piezoelectric film for integrated filters

An artificially oriented piezoelectric films for integrated filters and methods of manufacture. The method includes: forming a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited piezoelectric films; and formin...

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Bibliographische Detailangaben
Hauptverfasser:	Chandra, Bhupesh, McGahay, Vincent J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS RESONATORS TESTING
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Beschreibung
Zusammenfassung:	An artificially oriented piezoelectric films for integrated filters and methods of manufacture. The method includes: forming a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited piezoelectric films; and forming electrodes on a planar surface of the piezoelectric film. The piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the electrodes, and an effective crystalline orientation of the polar axis in a vertical direction adjacent to an underlying substrate.