Image sensor including fence structure disposed laterally of color filters

An image sensor includes; a photoelectric conversion element disposed on a substrate, a fence structure disposed on the substrate and including a low refractive index layer stacked on a barrier layer, wherein the barrier layer includes at least one metal, and a color filter disposed inwardly lateral...

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Hauptverfasser: Byun, Kyung Rae, Kwon, Doo Won, Park, Chan Ho, Lee, Dong-Chul, Jeon, Min Hwan, Chang, Chong Kwang
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creator Byun, Kyung Rae
Kwon, Doo Won
Park, Chan Ho
Lee, Dong-Chul
Jeon, Min Hwan
Chang, Chong Kwang
description An image sensor includes; a photoelectric conversion element disposed on a substrate, a fence structure disposed on the substrate and including a low refractive index layer stacked on a barrier layer, wherein the barrier layer includes at least one metal, and a color filter disposed inwardly lateral with respect to a sidewall of the fence structure, wherein the barrier layer includes an inward lateral protrusion.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
title Image sensor including fence structure disposed laterally of color filters
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