Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities

A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of...

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Bibliographische Detailangaben
Hauptverfasser:	Fife, Keith G, Liu, Jianwei, Lutsky, Joseph, Miao, Lingyun
Format:	Patent
Sprache:	eng
Schlagworte:	ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR DEAF-AID SETS DIAGNOSIS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY HUMAN NECESSITIES HYGIENE IDENTIFICATION LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEDICAL OR VETERINARY SCIENCE METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY MUSICAL INSTRUMENTS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PUBLIC ADDRESS SYSTEMS SOUND-PRODUCING DEVICES SURGERY TRANSPORTING
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