Method for producing a superjunction device

A method for producing a semiconductor device includes forming transistor cells in a semiconductor body, each cell including a drift region separated from a source region by a body region, a gate electrode dielectrically insulated from the body region, and a compensation region of a doping type comp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Weber, Hans, Schubert, Felix, Muri, Ingo, Tutuc, Daniel
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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