OTP-MTP on FDSOI architecture and method for producing the same

Methods of forming a compact FDSOI OTP/MTP cell and a compact FinFET OTP/MTP cell and the resulting devices are provided. Embodiments include forming a SOI region or a fin over a BOX layer over a substrate; forming a first and a second gate stack, laterally separated, over respective portions of the...

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Bibliographische Detailangaben
Hauptverfasser: Toh, Eng Huat, Tan, Shyue Seng, Quek, Elgin Kiok Boone
Format: Patent
Sprache:eng
Schlagworte:
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