Semiconductor device

A semiconductor device includes a substrate having a conductive region and an insulating region; gate electrodes including sub-gate electrodes spaced apart from each other and stacked in a first direction perpendicular to an upper surface of the substrate and extending in a second direction perpendi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Park, Bongtae, Kim, Jihye, Kim, Jiyoung, Lee, Jaehoon, Shim, Jaejoo
Format: Patent
Sprache:eng
Schlagworte:
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