Display apparatus

A display apparatus includes an oxide semiconductor pattern disposed on a device substrate and including a channel region disposed between a source region and a drain region, a gate electrode overlapping the channel region of the oxide semiconductor pattern and having a structure in which a first hy...

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Hauptverfasser: Jin, Jung-Doo, Noh, So-Young, Moon, Kyeong-Ju, Ji, Hyuk, Kim, Ki-Tae, Choi, Kye-Chul, Kim, Dong-Yup, Roh, Jin-Kyu, Kim, Chan-Ho
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creator Jin, Jung-Doo
Noh, So-Young
Moon, Kyeong-Ju
Ji, Hyuk
Kim, Ki-Tae
Choi, Kye-Chul
Kim, Dong-Yup
Roh, Jin-Kyu
Kim, Chan-Ho
description A display apparatus includes an oxide semiconductor pattern disposed on a device substrate and including a channel region disposed between a source region and a drain region, a gate electrode overlapping the channel region of the oxide semiconductor pattern and having a structure in which a first hydrogen barrier layer and a gate conductive layer are stacked, and a gate insulating film disposed between the oxide semiconductor pattern and the gate electrode to expose the source region and the drain region of the oxide semiconductor pattern. The gate electrode exposes a portion of the gate insulating film that is adjacent to the source region and a portion of the gate insulating film that is adjacent to the drain region.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Display apparatus
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