Charged particle beam apparatus and control method

A charged particle beam apparatus acquires an image that is not affected by movement of a stage at a high speed. The apparatus includes: a charged particle source for irradiating a sample with a charged particle beam; a stage on which the sample is placed; a measurement unit for measuring a movement...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bizen, Kaori, Bizen, Daisuke, Mizuhara, Yuzuru, Watanabe, Ryota
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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