Semiconductor package with redistribution structure and manufacturing method thereof

A semiconductor package includes a semiconductor die, a redistribution structure and connective terminals. The redistribution structure is disposed on the semiconductor die and includes a first metallization tier disposed in between a pair of dielectric layers. The first metallization tier includes...

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Hauptverfasser: Hsu, Li-Han, Wu, Wei-Cheng, Hsieh, Cheng-Hsien, Lee, Meng-Tsan, Chiu, Chien-Chia, Lin, Tsung-Shu
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creator Hsu, Li-Han
Wu, Wei-Cheng
Hsieh, Cheng-Hsien
Lee, Meng-Tsan
Chiu, Chien-Chia
Lin, Tsung-Shu
description A semiconductor package includes a semiconductor die, a redistribution structure and connective terminals. The redistribution structure is disposed on the semiconductor die and includes a first metallization tier disposed in between a pair of dielectric layers. The first metallization tier includes routing conductive traces electrically connected to the semiconductor die and a shielding plate electrically insulated from the semiconductor die. The connective terminals include dummy connective terminals and active connective terminals. The dummy connective terminals are disposed on the redistribution structure and are electrically connected to the shielding plate. The active connective terminals are disposed on the redistribution structure and are electrically connected to the routing conductive traces. Vertical projections of the dummy connective terminals fall on the shielding plate.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Semiconductor package with redistribution structure and manufacturing method thereof
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