Retaining ring with shaped surface and method of forming

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chen, Hung Chih, Wohlert, Martin S, Fong, Michael Jon, Doan, Trung T, Lu, Danny Cam Toan, Balagani, Venkata R, Huey, Sidney P, De Lamenie, Romain Beau, Allen, Aden Martin, Garretson, Charles C, Oh, Jeonghoon, Hughes, Kerry F, Meyer, Stacy, Lin, Jian, Zuniga, Steven M, Schmidt, Jeffrey P, Wang, James C, McAllister, Douglas R
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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