Retaining ring with shaped surface and method of forming

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping...

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Hauptverfasser: Chen, Hung Chih, Wohlert, Martin S, Fong, Michael Jon, Doan, Trung T, Lu, Danny Cam Toan, Balagani, Venkata R, Huey, Sidney P, De Lamenie, Romain Beau, Allen, Aden Martin, Garretson, Charles C, Oh, Jeonghoon, Hughes, Kerry F, Meyer, Stacy, Lin, Jian, Zuniga, Steven M, Schmidt, Jeffrey P, Wang, James C, McAllister, Douglas R
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creator Chen, Hung Chih
Wohlert, Martin S
Fong, Michael Jon
Doan, Trung T
Lu, Danny Cam Toan
Balagani, Venkata R
Huey, Sidney P
De Lamenie, Romain Beau
Allen, Aden Martin
Garretson, Charles C
Oh, Jeonghoon
Hughes, Kerry F
Meyer, Stacy
Lin, Jian
Zuniga, Steven M
Schmidt, Jeffrey P
Wang, James C
McAllister, Douglas R
description A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
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The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. 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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
title Retaining ring with shaped surface and method of forming
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