Bulk-acoustic wave resonator
A bulk-acoustic wave resonator includes: a substrate; a membrane layer forming a cavity with the substrate; a lower electrode disposed on the membrane layer; an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover...
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| creator | Jeong, Dae Hun Han, Sang Heon Son, Sang Uk Kim, Sung Wook Han, Won |
| description | A bulk-acoustic wave resonator includes: a substrate; a membrane layer forming a cavity with the substrate; a lower electrode disposed on the membrane layer; an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover the insertion layer; and an upper electrode at least partially disposed on the piezoelectric layer, wherein the upper electrode includes a reflection groove disposed on the insertion layer. |
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an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover the insertion layer; and an upper electrode at least partially disposed on the piezoelectric layer, wherein the upper electrode includes a reflection groove disposed on the insertion layer.</description><language>eng</language><subject>BASIC ELECTRONIC CIRCUITRY ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERATION ; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS ; RESONATORS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230117&DB=EPODOC&CC=US&NR=11558027B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230117&DB=EPODOC&CC=US&NR=11558027B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Jeong, Dae Hun</creatorcontrib><creatorcontrib>Han, Sang Heon</creatorcontrib><creatorcontrib>Son, Sang Uk</creatorcontrib><creatorcontrib>Kim, Sung Wook</creatorcontrib><creatorcontrib>Han, Won</creatorcontrib><title>Bulk-acoustic wave resonator</title><description>A bulk-acoustic wave resonator includes: a substrate; 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| subjects | BASIC ELECTRONIC CIRCUITRY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS |
| title | Bulk-acoustic wave resonator |
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