Semiconductor device
Semiconductor devices is provided. The semiconductor device includes a semiconductor substrate having a first region and an adjacent second region; a plurality of adjacent first fins in the first region of the semiconductor substrate; a plurality of adjacent second fins in the second region of the s...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | Semiconductor devices is provided. The semiconductor device includes a semiconductor substrate having a first region and an adjacent second region; a plurality of adjacent first fins in the first region of the semiconductor substrate; a plurality of adjacent second fins in the second region of the semiconductor substrate; a first type of fin sidewall spacers; a second type of fin sidewall spacers; first doped layers formed between adjacent first type of fin sidewall spacers in the first region; and second doped layers formed between adjacent first type of fin sidewall spacers in the second region. |
|---|