Semiconductor device

A semiconductor device includes a landing pad on a substrate, a lower electrode on the landing pad and connected to the landing pad, the lower electrode including an outer portion, the outer portion including first and second regions, and an inner portion inside the outer portion, a dielectric film...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Park, Young-Lim, Ahn, Se Hyoung, Jung, Kyoo Ho, An, Chang Mu, Kang, Sang Yeol
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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