Failure detection system and failure detection method

Failure detection system and failure detection method

A failure detection system detects a failure of a sensor that detects a state of a semiconductor manufacturing apparatus. The failure detection system includes a generation unit configured to generate times-series data of information on a detection value of the sensor during a determination period,...

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Hauptverfasser: Ouchi, Miki, Saito, Tomohiro, Takahashi, Masashi, Nakasato, Yuka
Format: Patent
Sprache:eng
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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creator Ouchi, Miki
Saito, Tomohiro
Takahashi, Masashi
Nakasato, Yuka
description A failure detection system detects a failure of a sensor that detects a state of a semiconductor manufacturing apparatus. The failure detection system includes a generation unit configured to generate times-series data of information on a detection value of the sensor during a determination period, a calculation unit configured to calculate a regression line of the times-series data, and a failure determination unit configured to determine whether the sensor has failed based on a slope of the regression line.
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subjects CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
title Failure detection system and failure detection method
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