Electron beam device

In an electron beam device provided with two columns including an irradiation optical system and an imaging optical system, a photoelectron image for use in adjusting the irradiation optical system is made sharper. The electron beam device includes: an irradiation optical system which irradiates a s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Murakoshi, Hisaya, Hasegawa, Masaki, Onuki, Katsunori, Ogata, Tomohiko, Kaneoka, Noriyuki
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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