Waveguide mirror and method of fabricating a waveguide mirror

A mirror and method of fabricating the mirror, the method comprising:providing a silicon-on-insulator substrate, the substrate comprising: a silicon support layer; a buried oxide (BOX) layer on top of the silicon support layer; and a silicon device layer on top of the BOX layer; creating a via in th...

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Bibliographische Detailangaben

Hauptverfasser:	Lerose, Damiana, Nagra, Amit Singh, Kho, Evie, Nykänen, Henri, Mäkelä, Sanna Leena, Drake, John Paul
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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