Semiconductor device for ambient sensing including a cavity and a mechanical filtering structure

A semiconductor device for ambient sensing including: a cap traversed by a hole; and a main body mechanically coupled to the cap so as to delimit a cavity, which is interposed between the main body and the cap. The main body includes a semiconductor body and a coupling structure, which is interposed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Azpeitia Urquia, Mikel, Allegato, Giorgio
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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