Multi-layer solution based deposition of dielectrics for advanced substrate architectures

Embodiments include an electronic package and methods of forming an electronic package. In an embodiment, the electronic package comprises a substrate, and a plurality of conductive features formed over the substrate. In an embodiment, a bilayer build-up layer is formed over the plurality of conduct...

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Hauptverfasser: Brown, Andrew, Park, Ji Yong, Alur, Amruthavalli, Xu, Cheng, Alur, Siddharth
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creator Brown, Andrew
Park, Ji Yong
Alur, Amruthavalli
Xu, Cheng
Alur, Siddharth
description Embodiments include an electronic package and methods of forming an electronic package. In an embodiment, the electronic package comprises a substrate, and a plurality of conductive features formed over the substrate. In an embodiment, a bilayer build-up layer is formed over the plurality of conductive features. In an embodiment, the bilayer build-up layer comprises a first dielectric layer and a second dielectric layer. In an embodiment, a surface of the first dielectric layer comprises depressions. In an embodiment, the second dielectric layer is disposed in the depressions of the surface of the first dielectric layer.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Multi-layer solution based deposition of dielectrics for advanced substrate architectures
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