Grid assembly and ion beam etching apparatus

An object of the invention is to provide a grid assembly which is easy to assemble and is high in assembly reproducibility, and an ion beam etching apparatus including it. A grid assembly is constructed of three grids each in the shape of a circular plate, which are stacked one on top of another. Th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tsujiyama, Masashi, Yasumatsu, Yasushi, Motochi, Kaori
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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