Array of vertical transistors and method used in forming an array of vertical transistors

An array of vertical transistors comprises spaced pillars of individual vertical transistors that individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. The upper source/drain region comprises a conductor oxide material in indi...

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Bibliographische Detailangaben

Hauptverfasser:	McDaniel, Terrence B, Yang, Sheng-Wei, Lee, Yi Fang, Heineck, Lars P, Guha, Jaydip, Karda, Kamal M, Sills, Scott E, Lee, Si-Woo, Torek, Kevin J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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