Method for manufacturing a multilayer radiation window and a multilayer radiation window

A method is for manufacturing a multilayer radiation window for an X-ray measurement apparatus. The method includes: producing a gas diffusion stop layer made of silicon nitride on a polished surface of a carrier; producing at least one combined layer on an opposite side of the gas diffusion stop la...

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Bibliographische Detailangaben
Hauptverfasser: Kostamo, Jari, Sipilä, Heikki
Format: Patent
Sprache:eng
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