Semiconductor device and method of fabricating the same

A semiconductor device is provided. The semiconductor device includes a plurality of lower electrodes arranged on a semiconductor substrate in a honeycomb structure; and a support connected to the plurality of lower electrodes and defining a plurality of open areas through which the plurality of low...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kim, Seungjin, Lee, Dongkyun, Kim, Cheonbae
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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