Electronic device and method for manufacturing electronic device

Electronic device and method for manufacturing electronic device

A method for manufacturing an electronic device including a semiconductor memory may include forming a first carbon electrode material, surface-treating the first carbon electrode material to decrease a surface roughness of the first carbon electrode material, and forming a second carbon electrode m...

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Hauptverfasser: Zang, Hwan Jun, Lee, Seung Yun, Cho, Byung Jick, Kim, Tae Hoon, Lee, Beom Seok, Kim, Myoung Sub, Han, Ji Sun
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Zang, Hwan Jun
Lee, Seung Yun
Cho, Byung Jick
Kim, Tae Hoon
Lee, Beom Seok
Kim, Myoung Sub
Han, Ji Sun
description A method for manufacturing an electronic device including a semiconductor memory may include forming a first carbon electrode material, surface-treating the first carbon electrode material to decrease a surface roughness of the first carbon electrode material, and forming a second carbon electrode material on the treated surface of the first carbon electrode material. The second carbon electrode material may have a thickness that is greater than a thickness of the first carbon electrode material.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Electronic device and method for manufacturing electronic device
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