Pedestal heater for spatial multi-wafer processing tool

Pedestal heater for spatial multi-wafer processing tool

Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third de...

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Hauptverfasser: Baluja, Sanjeev, Ulavi, Tejas, Kashyap, Dhritiman Subha
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
CORONA DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
OVERVOLTAGE ARRESTERS USING SPARK GAPS
SEMICONDUCTOR DEVICES
SPARK GAPS
SPARKING PLUGS
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creator Baluja, Sanjeev
Ulavi, Tejas
Kashyap, Dhritiman Subha
description Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third depth from the surface of the top plate. Substrate support assemblies comprising a plurality of substrate supports and methods of processing a substrate are also disclosed.
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subjects BASIC ELECTRIC ELEMENTS
CORONA DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
OVERVOLTAGE ARRESTERS USING SPARK GAPS
SEMICONDUCTOR DEVICES
SPARK GAPS
SPARKING PLUGS
title Pedestal heater for spatial multi-wafer processing tool
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