Capacitive sensors having temperature stable output
In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an envi...
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| creator | Singulani, Anderson Pires Goossens, Martijn Wunnicke, Olaf Vanhelmont, Frederik Willem Maurits Van Der Avoort, Casper Pijnenburg, Remco Henricus Wilhelmus Besling, Willem Frederik Adrianus |
| description | In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures. |
| format | Patent |
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The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.</description><language>eng</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PHYSICS ; TESTING ; TRANSPORTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220830&DB=EPODOC&CC=US&NR=11427465B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220830&DB=EPODOC&CC=US&NR=11427465B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Singulani, Anderson Pires</creatorcontrib><creatorcontrib>Goossens, Martijn</creatorcontrib><creatorcontrib>Wunnicke, Olaf</creatorcontrib><creatorcontrib>Vanhelmont, Frederik Willem Maurits</creatorcontrib><creatorcontrib>Van Der Avoort, Casper</creatorcontrib><creatorcontrib>Pijnenburg, Remco Henricus Wilhelmus</creatorcontrib><creatorcontrib>Besling, Willem Frederik Adrianus</creatorcontrib><title>Capacitive sensors having temperature stable output</title><description>In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.</description><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB2TixITM4sySxLVShOzSvOLypWyEgsy8xLVyhJzS1ILUosKS0CSpUkJuWkKuSXlhSUlvAwsKYl5hSn8kJpbgZFN9cQZw_d1IL8-NRioHmpeakl8aHBhoYmRuYmZqZORsbEqAEATAAtRw</recordid><startdate>20220830</startdate><enddate>20220830</enddate><creator>Singulani, Anderson Pires</creator><creator>Goossens, Martijn</creator><creator>Wunnicke, Olaf</creator><creator>Vanhelmont, Frederik Willem Maurits</creator><creator>Van Der Avoort, Casper</creator><creator>Pijnenburg, Remco Henricus Wilhelmus</creator><creator>Besling, Willem Frederik Adrianus</creator><scope>EVB</scope></search><sort><creationdate>20220830</creationdate><title>Capacitive sensors having temperature stable output</title><author>Singulani, Anderson Pires ; Goossens, Martijn ; Wunnicke, Olaf ; Vanhelmont, Frederik Willem Maurits ; Van Der Avoort, Casper ; Pijnenburg, Remco Henricus Wilhelmus ; Besling, Willem Frederik Adrianus</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11427465B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2022</creationdate><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Singulani, Anderson Pires</creatorcontrib><creatorcontrib>Goossens, Martijn</creatorcontrib><creatorcontrib>Wunnicke, Olaf</creatorcontrib><creatorcontrib>Vanhelmont, Frederik Willem Maurits</creatorcontrib><creatorcontrib>Van Der Avoort, Casper</creatorcontrib><creatorcontrib>Pijnenburg, Remco Henricus Wilhelmus</creatorcontrib><creatorcontrib>Besling, Willem Frederik Adrianus</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Singulani, Anderson Pires</au><au>Goossens, Martijn</au><au>Wunnicke, Olaf</au><au>Vanhelmont, Frederik Willem Maurits</au><au>Van Der Avoort, Casper</au><au>Pijnenburg, Remco Henricus Wilhelmus</au><au>Besling, Willem Frederik Adrianus</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Capacitive sensors having temperature stable output</title><date>2022-08-30</date><risdate>2022</risdate><abstract>In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING |
| title | Capacitive sensors having temperature stable output |
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