Micromechanical component for a sensor device or microphone device

A micromechanical component for a sensor device or microphone device. The component includes a diaphragm support structure with a diaphragm, a cavity formed in the diaphragm support structure and adjoined by a diaphragm inner side, and a separating trench structured through the surface of the diaphr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Scheurle, Andreas, Hermes, Christoph, Schmollngruber, Peter, Weber, Heribert, Friedrich, Thomas
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
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