Structure and method of producing the same

According to an embodiment, a structure includes a substrate including a semiconductor material, wherein the substrate is provided with one or more recesses each of which has a depth direction that is equal to a thickness direction of the substrate, and the one or more recesses include a sidewall on...

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Bibliographische Detailangaben
Hauptverfasser:	Higuchi, Kazuhito, Sano, Mitsuo, Obata, Susumu
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	According to an embodiment, a structure includes a substrate including a semiconductor material, wherein the substrate is provided with one or more recesses each of which has a depth direction that is equal to a thickness direction of the substrate, and the one or more recesses include a sidewall on which a plurality of grooves each extending in the depth direction are provided.