Control device, control system, control method, recording medium and machine learning device

A control device that controls a target vacuum pump including a motor, including: a decision unit that decides, using at least one of target state quantities at a time of a past stop process of the target vacuum pump or another vacuum pump wherein the target state quantities are state quantities whi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shiokawa, Atsushi, Sugiura, Tetsuro, Maishigi, Keiji
Format: Patent
Sprache:eng
Schlagworte:
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