Hydrogen separation membrane
The present invention pertains to a polycrystalline membrane containing metal nitride particles represented by the general formula MNx (where M is a metal element in which the Fermi energy is in a position higher than −4.4 eV vs L.V. and x is the range over which a rock salt-type structure can be as...
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creator | Kura, Chiharu Aoki, Yoshitaka Habazaki, Hiroki |
description | The present invention pertains to a polycrystalline membrane containing metal nitride particles represented by the general formula MNx (where M is a metal element in which the Fermi energy is in a position higher than −4.4 eV vs L.V. and x is the range over which a rock salt-type structure can be assumed), in which the crystallite size determined by transmission electron microscopy is 10 nm or less, at least some of the crystallites have rock salt-type structure, and the crystallites exhibit (111) orientation but substantially do not exhibit (100) orientation. The present invention also pertains to a method for manufacturing a polycrystalline membrane, comprising forming, by sputtering, a polycrystalline membrane on a substrate having a temperature of less than 200° C., the polycrystalline membrane being represented by the general formula MNx and being such that at least some crystallites have a rock salt structure and the crystallites exhibit (111) orientation but essentially do not exhibit (100) orientation. The present invention provides a hydrogen-permeable TiNx microparticle membrane exhibiting a higher mixed hydride ion (H−)-electron conduction. |
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The present invention also pertains to a method for manufacturing a polycrystalline membrane, comprising forming, by sputtering, a polycrystalline membrane on a substrate having a temperature of less than 200° C., the polycrystalline membrane being represented by the general formula MNx and being such that at least some crystallites have a rock salt structure and the crystallites exhibit (111) orientation but essentially do not exhibit (100) orientation. 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The present invention also pertains to a method for manufacturing a polycrystalline membrane, comprising forming, by sputtering, a polycrystalline membrane on a substrate having a temperature of less than 200° C., the polycrystalline membrane being represented by the general formula MNx and being such that at least some crystallites have a rock salt structure and the crystallites exhibit (111) orientation but essentially do not exhibit (100) orientation. 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The present invention also pertains to a method for manufacturing a polycrystalline membrane, comprising forming, by sputtering, a polycrystalline membrane on a substrate having a temperature of less than 200° C., the polycrystalline membrane being represented by the general formula MNx and being such that at least some crystallites have a rock salt structure and the crystallites exhibit (111) orientation but essentially do not exhibit (100) orientation. The present invention provides a hydrogen-permeable TiNx microparticle membrane exhibiting a higher mixed hydride ion (H−)-electron conduction.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING |
title | Hydrogen separation membrane |
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