MEMS optical switch with stop control

An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins config...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wang, Ning, Kueppers, Hartmut, Krishnamoorthy, Uma, Schelling, Christoph, Huebel, Alexander, Pinter, Stefan
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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