Semiconductor wafer handling and transport

A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of...

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Bibliographische Detailangaben
1. Verfasser: Caveney, Robert T
Format: Patent
Sprache:eng
Schlagworte:
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