Aberration correction in charged particle system

A lens element of a charged particle system comprises an electrode having a central opening. The lens element is configured for functionally cooperating with an aperture array that is located directly adjacent said electrode, wherein the aperture array is configured for blocking part of a charged pa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Van Veen, Alexander Hendrik Vincent, Urbanus, Willem Henk, Wieland, Marco Jan-Jaco
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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