Charged particle beam system

There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser r...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chiyo, Izuru, Fujimoto, Naoki, Naganuma, Tomoyuki
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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