MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof

The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Brunetto, Matteo Fabio, Guerinoni, Luca, Falorni, Luca Giuseppe
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING TRANSPORTING
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