MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure i...
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| creator | Brunetto, Matteo Fabio Guerinoni, Luca Falorni, Luca Giuseppe |
| description | The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US11340069B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US11340069B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US11340069B23</originalsourceid><addsrcrecordid>eNqNi7EKwjAQQLM4iPoP5wcIrRXBVam4dKrO4UwvTSDNheRA_HsVXNycHjzemyvdtV0P4zNzMZwIHl4cGAz-nlE8R2AL4gjK2xFYNMIZfIRMGED8RIBx-BkmEsfDZ8rEdqlmFkOh1ZcLtT6319NlQ4k1lYSGIom-9XXd7Kpqfzhum3-aFxoEPGs</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof</title><source>esp@cenet</source><creator>Brunetto, Matteo Fabio ; Guerinoni, Luca ; Falorni, Luca Giuseppe</creator><creatorcontrib>Brunetto, Matteo Fabio ; Guerinoni, Luca ; Falorni, Luca Giuseppe</creatorcontrib><description>The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.</description><language>eng</language><subject>GYROSCOPIC INSTRUMENTS ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; NAVIGATION ; PERFORMING OPERATIONS ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; SURVEYING ; TESTING ; TRANSPORTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220524&DB=EPODOC&CC=US&NR=11340069B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220524&DB=EPODOC&CC=US&NR=11340069B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Brunetto, Matteo Fabio</creatorcontrib><creatorcontrib>Guerinoni, Luca</creatorcontrib><creatorcontrib>Falorni, Luca Giuseppe</creatorcontrib><title>MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof</title><description>The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.</description><subject>GYROSCOPIC INSTRUMENTS</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>NAVIGATION</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>SURVEYING</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNi7EKwjAQQLM4iPoP5wcIrRXBVam4dKrO4UwvTSDNheRA_HsVXNycHjzemyvdtV0P4zNzMZwIHl4cGAz-nlE8R2AL4gjK2xFYNMIZfIRMGED8RIBx-BkmEsfDZ8rEdqlmFkOh1ZcLtT6319NlQ4k1lYSGIom-9XXd7Kpqfzhum3-aFxoEPGs</recordid><startdate>20220524</startdate><enddate>20220524</enddate><creator>Brunetto, Matteo Fabio</creator><creator>Guerinoni, Luca</creator><creator>Falorni, Luca Giuseppe</creator><scope>EVB</scope></search><sort><creationdate>20220524</creationdate><title>MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof</title><author>Brunetto, Matteo Fabio ; Guerinoni, Luca ; Falorni, Luca Giuseppe</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11340069B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2022</creationdate><topic>GYROSCOPIC INSTRUMENTS</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>NAVIGATION</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>SURVEYING</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Brunetto, Matteo Fabio</creatorcontrib><creatorcontrib>Guerinoni, Luca</creatorcontrib><creatorcontrib>Falorni, Luca Giuseppe</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Brunetto, Matteo Fabio</au><au>Guerinoni, Luca</au><au>Falorni, Luca Giuseppe</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof</title><date>2022-05-24</date><risdate>2022</risdate><abstract>The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING TRANSPORTING |
| title | MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof |
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