Inspection system of semiconductor device and related inspection method

An inspection system of semiconductor device includes a light source for producing a light beam, a lens module including at least one metalens, a receiver, and a processor. During an inspection process, the light beam emitted from the light source is focused on a target object by the metalens of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chen, Jin Xing, Chen, Guangdian
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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