Probe systems and methods for characterizing optical coupling between an optical probe of a probe system and a calibration structure

Probe systems and methods of characterizing optical coupling between an optical probe of a probe system and a calibration structure. The probe systems include a probe assembly that includes an optical probe, a support surface configured to support a substrate, and a signal generation and analysis as...

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Bibliographische Detailangaben

Hauptverfasser:	Negishi, Kazuki, Frankel, Joseph George
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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