Microlenses for semiconductor device with single-photon avalanche diode pixels

An imaging device may include a plurality of single-photon avalanche diode (SPAD) pixels. The SPAD pixels may be overlapped by square toroidal microlenses to direct light incident on the pixels onto photosensitive regions of the pixels. The square toroidal microlenses may be formed as first and seco...

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Bibliographische Detailangaben
Hauptverfasser: Boettiger, Ulrich, Sulfridge, Marc Allen, Lee, Byounghee
Format: Patent
Sprache:eng
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