Integrated circuit device including photoelectronic element

An integrated circuit (IC) device includes an optical IC substrate, a local trench inside the optical IC substrate, and a photoelectronic element including a photoelectric conversion layer buried inside the local trench. The photoelectric conversion layer is buried inside the local trench in the opt...

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Hauptverfasser: Cho, Keun-yeong, Kim, Jung-hye, Ji, Ho-chul
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creator Cho, Keun-yeong
Kim, Jung-hye
Ji, Ho-chul
description An integrated circuit (IC) device includes an optical IC substrate, a local trench inside the optical IC substrate, and a photoelectronic element including a photoelectric conversion layer buried inside the local trench. The photoelectric conversion layer is buried inside the local trench in the optical IC substrate to form the photoelectronic element. Thus, the IC device may inhibit warpage of the optical IC substrate.
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subjects OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
title Integrated circuit device including photoelectronic element
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