Generating three dimensional information regarding structural elements of a specimen

A method, a non-transitory computer readable medium and a three-dimensional evaluation system for providing three dimensional information regarding structural elements of a specimen. The method can include illuminating the structural elements with electron beams of different incidence angles, where...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Eytan, Guy, Shani, Itamar, Chirko, Konstantin, Litman, Alon, Karabekov, Albert, Yaron, Lior
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!