Metrology apparatus

A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a det...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Akbulut, Duygu, Van Der Pasch, Engelbertus Antonius Fransiscus, Den Boef, Arie Jeffrey, Van Dam, Marinus Johannes Maria, Reijnders, Marinus Petrus, Zijp, Ferry, Butler, Hans, Cramer, Hugo Augustinus Joseph, Pandey, Nitesh, Raaymakers, Jeroen Arnoldus Leonardus Johannes
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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