Metrology apparatus

A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a det...

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Hauptverfasser: Akbulut, Duygu, Van Der Pasch, Engelbertus Antonius Fransiscus, Den Boef, Arie Jeffrey, Van Dam, Marinus Johannes Maria, Reijnders, Marinus Petrus, Zijp, Ferry, Butler, Hans, Cramer, Hugo Augustinus Joseph, Pandey, Nitesh, Raaymakers, Jeroen Arnoldus Leonardus Johannes
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creator Akbulut, Duygu
Van Der Pasch, Engelbertus Antonius Fransiscus
Den Boef, Arie Jeffrey
Van Dam, Marinus Johannes Maria
Reijnders, Marinus Petrus
Zijp, Ferry
Butler, Hans
Cramer, Hugo Augustinus Joseph
Pandey, Nitesh
Raaymakers, Jeroen Arnoldus Leonardus Johannes
description A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a detection optical sensor and at least one lens for capturing a portion of illumination radiation scattered by the structure and transmitting the captured radiation towards the detection optical sensor, wherein the illumination optical system and the detection optical system do not share an optical element.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MATERIALS THEREFOR
MEASURING
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TESTING
title Metrology apparatus
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