High temperature face plate for deposition application

Embodiments of the disclosure relate to faceplates for a processing chamber. In one example, a faceplate includes a body having a plurality of apertures formed therethrough. A heating element is disposed within the body, and the heating element circumscribes the plurality of apertures. A support rin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Bansal, Amit Kumar, Nguyen, Tuan Anh, Rathi, Saket
Format: Patent
Sprache:eng
Schlagworte:
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