Pattern cross-sectional shape estimation system and program

The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front sta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yokosuka, Toshiyuki, Bizen, Daisuke, Suzuki, Makoto, Yasui, Kenji, Kazumi, Hideyuki, Abe, Yusuke, Osaki, Mayuka, Kitsuki, Hirohiko
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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