Pattern cross-sectional shape estimation system and program

Pattern cross-sectional shape estimation system and program

The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front sta...

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Hauptverfasser: Yokosuka, Toshiyuki, Bizen, Daisuke, Suzuki, Makoto, Yasui, Kenji, Kazumi, Hideyuki, Abe, Yusuke, Osaki, Mayuka, Kitsuki, Hirohiko
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator Yokosuka, Toshiyuki
Bizen, Daisuke
Suzuki, Makoto
Yasui, Kenji
Kazumi, Hideyuki
Abe, Yusuke
Osaki, Mayuka
Kitsuki, Hirohiko
description The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US11211226B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US11211226B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US11211226B23</originalsourceid><addsrcrecordid>eNrjZLAOSCwpSS3KU0guyi8u1i1OTS7JzM9LzFEozkgsSFVILS7JzE0ECSkUVxaXpOYqJOalKBQU5acXJebyMLCmJeYUp_JCaW4GRTfXEGcP3dSC_PjU4oLE5NS81JL40GBDQyMgMjJzMjImRg0A9Q4wCw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Pattern cross-sectional shape estimation system and program</title><source>esp@cenet</source><creator>Yokosuka, Toshiyuki ; Bizen, Daisuke ; Suzuki, Makoto ; Yasui, Kenji ; Kazumi, Hideyuki ; Abe, Yusuke ; Osaki, Mayuka ; Kitsuki, Hirohiko</creator><creatorcontrib>Yokosuka, Toshiyuki ; Bizen, Daisuke ; Suzuki, Makoto ; Yasui, Kenji ; Kazumi, Hideyuki ; Abe, Yusuke ; Osaki, Mayuka ; Kitsuki, Hirohiko</creatorcontrib><description>The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211228&amp;DB=EPODOC&amp;CC=US&amp;NR=11211226B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211228&amp;DB=EPODOC&amp;CC=US&amp;NR=11211226B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Yokosuka, Toshiyuki</creatorcontrib><creatorcontrib>Bizen, Daisuke</creatorcontrib><creatorcontrib>Suzuki, Makoto</creatorcontrib><creatorcontrib>Yasui, Kenji</creatorcontrib><creatorcontrib>Kazumi, Hideyuki</creatorcontrib><creatorcontrib>Abe, Yusuke</creatorcontrib><creatorcontrib>Osaki, Mayuka</creatorcontrib><creatorcontrib>Kitsuki, Hirohiko</creatorcontrib><title>Pattern cross-sectional shape estimation system and program</title><description>The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLAOSCwpSS3KU0guyi8u1i1OTS7JzM9LzFEozkgsSFVILS7JzE0ECSkUVxaXpOYqJOalKBQU5acXJebyMLCmJeYUp_JCaW4GRTfXEGcP3dSC_PjU4oLE5NS81JL40GBDQyMgMjJzMjImRg0A9Q4wCw</recordid><startdate>20211228</startdate><enddate>20211228</enddate><creator>Yokosuka, Toshiyuki</creator><creator>Bizen, Daisuke</creator><creator>Suzuki, Makoto</creator><creator>Yasui, Kenji</creator><creator>Kazumi, Hideyuki</creator><creator>Abe, Yusuke</creator><creator>Osaki, Mayuka</creator><creator>Kitsuki, Hirohiko</creator><scope>EVB</scope></search><sort><creationdate>20211228</creationdate><title>Pattern cross-sectional shape estimation system and program</title><author>Yokosuka, Toshiyuki ; Bizen, Daisuke ; Suzuki, Makoto ; Yasui, Kenji ; Kazumi, Hideyuki ; Abe, Yusuke ; Osaki, Mayuka ; Kitsuki, Hirohiko</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11211226B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>Yokosuka, Toshiyuki</creatorcontrib><creatorcontrib>Bizen, Daisuke</creatorcontrib><creatorcontrib>Suzuki, Makoto</creatorcontrib><creatorcontrib>Yasui, Kenji</creatorcontrib><creatorcontrib>Kazumi, Hideyuki</creatorcontrib><creatorcontrib>Abe, Yusuke</creatorcontrib><creatorcontrib>Osaki, Mayuka</creatorcontrib><creatorcontrib>Kitsuki, Hirohiko</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Yokosuka, Toshiyuki</au><au>Bizen, Daisuke</au><au>Suzuki, Makoto</au><au>Yasui, Kenji</au><au>Kazumi, Hideyuki</au><au>Abe, Yusuke</au><au>Osaki, Mayuka</au><au>Kitsuki, Hirohiko</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Pattern cross-sectional shape estimation system and program</title><date>2021-12-28</date><risdate>2021</risdate><abstract>The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Pattern cross-sectional shape estimation system and program
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-02T04%3A47%3A12IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Yokosuka,%20Toshiyuki&rft.date=2021-12-28&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS11211226B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true